High-Vacuum Electron-Beam Evaporation Coating System
Category: Thin Film Preparation
Overview
Technical Specifications
This product is a high-end piece of equipment specifically developed for the preparation of high-precision, high-purity thin films. It integrates electron-beam evaporation technology with a high-vacuum system, catering to both laboratory R&D and small-batch production needs. Widely used in industries such as semiconductors, optics, and new energy, it provides stable and reliable hardware support for the deposition of thin films made from a variety of materials, including metals, oxides, and ceramics.
Key features:
1. High-vacuum assurance: Equipped with a high-efficiency vacuum pumping system that delivers ultra-high vacuum and excellent sealing, effectively isolating the process from impurity interference to ensure film purity and prevent oxidative contamination.
2. Precise electron-beam control: The electron gun provides precise focusing and highly concentrated energy, enabling stable evaporation of high-melting-point materials. This results in uniform, dense film layers with strong adhesion and reduced defects.
3. Intelligent and Convenient Operation: The touch-based user interface supports presetting, storing, and recalling process parameters, ensuring simple operation, minimizing human error, and accommodating both research and production environments.
4. High adaptability: Compatible with a wide range of coating materials, it can fabricate single-layer and multilayer composite films to meet diverse research and production requirements, while featuring a compact design and easy maintenance.
| Project | Details | |
| Sample stage | External dimensions | <150 mm, sample stage is rotatable |
| Adjustable temperature | ≦500℃ | |
| Electron gun | New-type electron gun, 6-hole crucible | |
| Heating lamp | Four halogen heating lamps are used for degassing, and one neon lamp is used for illumination. | |
| Vacuum chamber | Cavity dimensions | Φ500*H500mm |
| Observation Window | Diameter φ100mm | |
| Cavity Material | 304 stainless steel | |
| Activation Method | Front-opening type | |
| Film thickness measurement | Monitoring is performed using an SQM160 film-thickness gauge, with coating thickness non-uniformity less than 6%. | |
| Vacuum system | Front-stage pump | Two-stage rotary vane pump, gas pumping speed 1.1 L/s |
| Secondary pump | Turbomolecular pump, gas pumping speed 600 L/s | |
| Vacuum measurement | Combined vacuum gauge (ionization gauge + resistance gauge) | |
| System vacuum | 5×10⁻⁵ Pa | |
| Water-cooling system | Water pressure < 2.5 bar, water pressure monitoring | |
| Heating lamp | Four halogen heating lamps are used for degassing, and one neon lamp is used for illumination. | |
| Electrode interface | Equipped with two metal steam electrode interfaces | |
| Control System | CYKY’s self-developed professional-grade controller | |
| Other parameters | Power supply | AC 380V, 50Hz |
| Overall dimensions | 1000mm × 800mm × 1500mm | |
| Total machine power | 20KW | |
| Overall weight | 350kg | |
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