Optical Fiber Winding Single-Target Magnetron Sputtering Coating System

Category: Magnetron sputtering system

This product is a specialized thin-film deposition system based on PVD technology, integrating single-target magnetron sputtering with fiber-winding wire technology. Its key advantages include: highly uniform and dense film layers with high purity and strong adhesion; precise control over film thickness and composition coupled with high sputtering efficiency; compatibility with a wide range of target materials and substrates, making it suitable for both research and industrial applications. The equipment features stable operation, user-friendly controls, and compliance with critical performance parameters, enabling the efficient production of high-quality thin films for diverse applications in microelectronics, optics, new energy, and other fields. It can fabricate optical coatings, semiconductor conductive films, solar cells, and LED devices, as well as protective coatings with water-repellent and wear-resistant properties, thereby meeting the demanding requirements for high-precision thin-film deposition across multiple industries.

Overview

Technical Specifications

This product is a specialized thin-film deposition system based on physical vapor deposition (PVD) technology. It employs single-target magnetron sputtering combined with fiber-winding wire technology to sputter high-purity target materials under the combined action of high voltage and magnetic fields, depositing the sputtered particles onto a substrate to form a thin film. The system is suitable for a wide range of research and industrial applications. Its primary application is the preparation of various high-quality thin films, which are extensively used in microelectronics, optics, new energy, and other fields. Specifically, it can produce high-reflectivity/anti-reflection optical coatings, semiconductor conductive films, solar cells, LED devices, as well as protective coatings with water-repellent and wear-resistant properties.

Key features:
1. Equipped with a 2-inch single-target magnetron sputtering target and a water-cooling system; the vacuum chamber is made of 304 stainless steel (Φ213 mm × 307 mm) and features a composite vacuum gauge to ensure a clean deposition environment; the wire-winding speed is adjustable from 1 to 300 r/min; the total power rating is 2 kW, with an AC 220 V, 50 Hz power supply that automatically matches the load, ensuring convenient operation, stable performance, and high coating accuracy and efficiency.
2. Superior film quality: The prepared thin films are uniform and dense, exhibit high purity and strong adhesion, meet the requirements of high-precision applications, and are compatible with a wide range of substrate materials.
3. Precise and Efficient Control: By integrating fiber-winding technology, the target-to-substrate distance and sputtering energy can be flexibly adjusted, enabling precise control over film thickness and composition while enhancing sputtering rate and film quality.
4. Wide range of applications: Compatible with a variety of target materials, including metals and alloys, it can meet the thin-film deposition requirements across multiple fields such as optics, electronics, and protective coatings, while catering to both research and industrial applications.
 

Supply voltage AC 220V, 50Hz
Total machine power 2kw
Wire-wrapping mechanism Size Φ15mm x 245mm
Wire winding speed 1-300r/min
Magnetron Sputtering Target Quantity 2 inches x 1
Cooling method Water cooling
Vacuum chamber Cavity dimensions Φ213mm x 307mm
Observation Window φ80mm
Activation method Top-opening and left-side-opening
Cavity material Stainless steel 304
Power Configuration Number of DC power supplies 1 unit
Output power ≤300W
Matching Method Automatic matching
Water-cooling system Water tank capacity 9L
Traffic 10L/min
Gas Supply System Type Manual Micro-Adjustment Valve
Vacuum system Front-stage pump Two-stage rotary vane pump
Pumping speed 1.1L/s
Secondary pump Turbomolecular pump
Pumping speed 60L/s
Exhaust port ISO63
Air outlet KF16
Vacuum gauge Composite vacuum gauge

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