Heated Anti-Corrosion Rotary Coater
Category: Programmable Spin Coater
Overview
Technical Specifications
This heated, corrosion-resistant spin coater is a spin-coating system equipped with heating functionality and a corrosion-resistant chamber, designed for depositing photoresists, pastes, and corrosive chemicals onto substrates while simultaneously spinning and heating to form a uniform film. The instrument features an advanced precision motor capable of speeds up to 10,000 rpm, ensuring excellent film uniformity. In addition to basic spin-coating functions, it is fitted with a heating module that can reach temperatures of up to 200°C, controlled by an intelligent temperature controller for precise temperature regulation and fully controllable heating. Furthermore, the device incorporates a touch-screen interface that allows users to pre-set spin-coating profiles, significantly simplifying operation and reducing the learning curve, making it an ideal choice for laboratory procurement.
Key features:
1. Combines heating and anti-corrosion functions in one, enabling simultaneous spin-coating and drying, and is compatible with a wide range of corrosion-resistant coatings and heat-sensitive pastes.
2. Resistant to acids and alkalis, as well as organic solvents; exhibits no swelling, corrosion, or deformation even after prolonged use.
3. Rapid drying results in higher film quality, reducing defects such as pinholes, flow marks, and orange peel; the resulting film is denser and more uniform, with stronger adhesion.
4. Precise temperature control, excellent process repeatability, and high batch-to-batch consistency make it ideal for R&D and small-batch, stable production.
5. The sealed chamber is safe and environmentally friendly, minimizing the volatilization of harmful gases and the spread of odors; it is easy to clean, non-stick, and helps reduce pollution and maintenance costs.
| Spin Coater | Supply voltage | AC 220V, 50Hz |
| Rotational speed | 0~10,000 rpm | |
| Acceleration | 100~5000 rpm/s | |
| Rotational speed resolution | 1rpm | |
| Single-step time | 3000s | |
| Substrate size | Diameter ≤ 8 inches (200 mm) | |
| Cavity Material | Polytetrafluoroethylene | |
| Heating temperature | ≤200℃ | |
| Temperature control method | AIP Intelligent Temperature Control | |
| Operating Method | 7-inch HD LCD touchscreen | |
| Resin casting method | Manual resin dispensing; precision syringe pump available as an option. | |
| Coating curve | Each curve consists of 5 segments, for a total storage capacity of 5 curves. | |
| Vacuum port | φ6mm quick-connect fitting | |
| Overall dimensions | 290 mm × 365 mm × 300 mm | |
| Overall weight | 15kg | |
| Exhaust system | Vacuum pump | Dry mechanical pump |
| Pumping speed | 50L/min | |
| Power supply | AC 220V, 50/60 Hz |
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