8-inch spin coater with six-channel independent control injection pumps
Category： Programmable Spin Coater
Overview
Technical Specifications
This product is a dedicated 8-inch spin-coating system equipped with six independently controlled syringe pumps. The compact and flexible design ensures convenient operation, enabling precise dispensing of photoresist via the syringe pumps and achieving uniform coating through high-speed rotation; it can also operate in standalone spin-coating mode. The chamber is fitted with built-in heating elements, allowing direct baking of the coated film after spin-coating. Two float-type flow meters are provided for precise control of the gas supply, and the introduction of an inert gas effectively isolates the coating from ambient air, preventing oxidation and degradation of the photoresist and ensuring superior coating quality. This system is primarily suited for process and mask-surface coating applications on semiconductor wafers, microscope slides, silicon chips, substrates, ITO conductive glass, and similar materials. It can stably handle wafers up to 8 inches in diameter and, thanks to its precise photoresist delivery and spin-coating control, rigorously maintains consistent and uniform coating thickness. It is ideal for a wide range of precision coating scenarios, including laboratory R&D and small-batch production, and meets the coating requirements of various materials and processes.
Product Features
1. Outstanding core performance and precise, controllable coating: Equipped with a brushless DC motor paired with a high-precision microcontroller for control, the system achieves a speed accuracy of up to 3,000 rpm and an acceleration of up to 2,000 rpm, with rapid start-up response and low speed fluctuation. A newly added six-channel independent control syringe pump allows independent adjustment of adhesive flow rate and delivery speed for each channel, enabling synchronous or individual dispensing of multiple adhesive streams. This ensures precise alignment with diverse coating process requirements, simplifies operation, further enhances the consistency and uniformity of coating thickness, and delivers optimal performance across a wide range of precision coating applications.
2. Intelligent operational upgrade for substantial efficiency gains: Equipped with a high-definition touch-control display, the system supports seamless switching between single-step and multi-step spin-coating modes and allows pre-setting and storing up to five programs. Each program can be precisely configured in five steps, with adjustable settings for key parameters such as spin speed, syringe pump parameters, and heating temperature, thereby enabling automated, standardized operation, reducing manual intervention, significantly enhancing operational efficiency and convenience, and minimizing human error.
3. The structural design combines practicality with professionalism, making it suitable for a wide range of applications: an anti-clogging adhesive delivery system effectively prevents adhesive from clogging the syringe pump and nozzles, ensuring uninterrupted operation; an integrally-molded aluminum alloy chamber offers high mechanical strength, excellent corrosion resistance, and easy cleaning, ensuring robust durability and long-term stable performance; the system integrates multiple auxiliary functions, including precise adhesive dispensing via syringe pump, ultrasonic-assisted coating, atmosphere protection, and thermal baking, which are deeply coordinated with the equipment’s core spin-coating and bake-out functions, comprehensively meeting the research and production needs for spin-coating of 8-inch wafers and various small substrates.
| Power supply | AC 220V, 50Hz | |
| Sample size | Diameter up to 8" (~200mm) | |
| Cavity Material | Stainless steel | |
| Top cover (special requirements) | Quantity: 2 (including 1 spare, which is only the lid and does not include other components). Made of quartz material for easy observation of the spin-coating process. | |
| Rotational speed | Adjustable from 0 to 8,000 rpm | |
| Acceleration | 100~5000 rpm/s | |
| Speed resolution | 1rpm | |
| Operation Mode | Touchscreen control | |
| Infusion pump device | Six-channel independently controlled syringe pumps, but the pump control software is compatible with the spin coater. | |
| Applicable syringe specifications: 1 ml – 60 ml | ||
| Maximum stroke: 90 mm | ||
| Linear speed range: 7.94 µm/min–79.4 mm/min | ||
| Stroke control accuracy: error ≤ ±0.5% (when stroke ≥ 30% of peak stroke) | ||
| Rated linear thrust: >90 N | ||
| Drip Device (Special Requirements) | ·Automatic and programmable droplet dispensing | |
| ·Six independent syringes and drip ports, with no cross-contamination | ||
| · Syringe capacity: 5 ml and above | ||
| ·Two of the dispensing lines have stringent control requirements: the dispensed volume must be highly reproducible, with each dispensing step limited to 50 µL ± 5 µL; these two lines are used for toluene solutions. The remaining four lines have slightly less stringent control requirements, with a minimum dispensing volume of 500 µL ± 50 µL, and are used for octane or acetonitrile solutions. | ||
| ·The tubing and syringes must exhibit excellent resistance to the solvents toluene, octane, and acetonitrile. | ||
| ·All connections between the tubing and the syringe must be securely sealed to prevent leaks. | ||
| Control Software (Special Requirements) | The program and storage recipe consist of steps. Each step has at least the following configurable parameters: time, rotation speed, ramp rate, dispensing volume for each of the six dispensing lines, and dispensing speed for each of the six dispensing lines. | |
| The formulation allows for a subset of the cycle steps. | ||
| Typical examples of control software recipes: | ||
| Step 1: Inject 50 µL of solvent using Pump 1. | ||
| Step 2: Immediately, the spin coater begins spinning at 3000 rpm for 30 seconds and then stops. | ||
| Step 3: Inject 200 µL of solvent using syringe pump 2. | ||
| Step 4: After 30 seconds, the spin coater begins rotating at 3,000 rpm. | ||
| Step 5: After 10 seconds, pump 3 delivers 1 mL of solvent. | ||
| Step 6: After 40 seconds, the spin coater stops. | ||
| Step 7: Repeat Steps 1 through 6 ten times. | ||
| Suction cup | 4 pieces (aluminum alloy, diameters: 10 mm, 25 mm, 55 mm, and 150 mm) | |
| Vacuum pump | Oil-free pump | |
| Pump pumping speed | 50 L/min | |
| Spin Coater Dimensions | 290mm*365mm*300mm | |
| Net weight of the coating machine | 20kg | |
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