Vacuum Programmable Spin Coater

Category: Programmable Spin Coater

This vacuum-programmable spin coater is primarily designed for coating thin-film materials such as liquids, gel-like substances, and flowable pastes. It can instantly deliver precisely controlled high rotational speeds, enabling rapid and uniform film formation on substrates. The instrument features simple operation, easy cleaning, and a compact footprint, making it suitable for core thin-film fabrication in fields including semiconductor and microelectronic devices, next-generation energy storage batteries, display and optoelectronic products, precision functional films, optical and glass products, biomedical and medical devices, and research samples of various materials. Consequently, this equipment is widely employed in universities, colleges, and research institutes.

Overview

Technical Specifications

This vacuum-programmable spin coater is a precision spin-coating system equipped with vacuum adsorption and program control, designed for the uniform application of photoresist and functional thin films onto substrates such as wafers and glass. During operation, the sample is securely mounted on the sample holder using an adhesive bonding method. The spin coater is then started, with the rotation speed set within a specified range; within this range, a defined spin-coating time is programmed to deliver the photoresist to the sample. Upon completion of the spin-coating process, the machine increases the rotation speed to the maximum limit to perform the spin-coating step. Prior to spin-coating, the spin-coating time must be set; once this time has elapsed, the machine automatically shuts down, thereby completing the entire coating process. 
Key features: 
1. High-Definition Text Display 
2. Single-step and multi-step spin-coating operations 
3. Anti-clogging adhesive design 
4. PP corrosion-resistant inner chamber, replaceable 
5. Solvent-Resistant PC Transparent Cover 
6. Corrosion-resistant, easy-to-clean PP housing 
7. Multi-Angle Positioning Hinge Design 
8. Aluminum Alloy Vacuum Suction Cup

Rotational speed accuracy1RPM
Target Speed<5000RPM
Acceleration<5000 RPM/s (depending on torque magnitude)
Internal cavity vacuum negative pressure<-0.06 MPa
Multi-step execution100 sets of 100 steps
Single step3000S
Temporal resolution0.1S

Price Inquiry

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