Vacuum Programmable Spin Coater
Category: Programmable Spin Coater
Overview
Technical Specifications
This vacuum-programmable spin coater is a precision spin-coating system equipped with vacuum adsorption and program control, designed for the uniform application of photoresist and functional thin films onto substrates such as wafers and glass. During operation, the sample is securely mounted on the sample holder using an adhesive bonding method. The spin coater is then started, with the rotation speed set within a specified range; within this range, a defined spin-coating time is programmed to deliver the photoresist to the sample. Upon completion of the spin-coating process, the machine increases the rotation speed to the maximum limit to perform the spin-coating step. Prior to spin-coating, the spin-coating time must be set; once this time has elapsed, the machine automatically shuts down, thereby completing the entire coating process.
Key features:
1. High-Definition Text Display
2. Single-step and multi-step spin-coating operations
3. Anti-clogging adhesive design
4. PP corrosion-resistant inner chamber, replaceable
5. Solvent-Resistant PC Transparent Cover
6. Corrosion-resistant, easy-to-clean PP housing
7. Multi-Angle Positioning Hinge Design
8. Aluminum Alloy Vacuum Suction Cup
| Rotational speed accuracy | 1RPM |
| Target Speed | <5000RPM |
| Acceleration | <5000 RPM/s (depending on torque magnitude) |
| Internal cavity vacuum negative pressure | <-0.06 MPa |
| Multi-step execution | 100 sets of 100 steps |
| Single step | 3000S |
| Temporal resolution | 0.1S |
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