Vacuum Corrosion-Resistant Spin Coater
Category： Programmable Spin Coater
Overview
Technical Specifications
This vacuum-protected spin coater is a spin-coating system that integrates vacuum adsorption with a corrosion-resistant chamber, designed for applying photoresist and acidic or alkaline etchants onto wafers and substrates. The equipment supports both vacuum and conventional operating modes and can function either by evacuating the chamber or by employing vacuum adsorption of the substrate.
Key features:
1. The main housing of the vacuum anti-corrosion spin coater is made of PP, which is corrosion-resistant and easy to clean.
2. The inner cavity is made of easy-to-clean, corrosion-resistant ultra-high-molecular-weight polyethylene (HDPE).
3. Industrial-grade servo motors are used, with a motor design that prevents contaminants such as photoresist from entering the motor interior.
4. The exhaust and pumping system is positioned at the bottom of the sample stage (to enhance exhaust efficiency and spin-coating uniformity).
5. A transparent, chemically resistant sealing lid that prevents photoresist overflow during spin-coating and effectively blocks the release of toxic fumes.
| Spin-coating procedure | Up to 100 programs can be stored, with each program containing up to 100 steps, and each step can be controlled to within 0.1 seconds. |
| Rotational speed | 0–10,000 rpm (higher speeds available as an option) |
| Spin-coating acceleration | 0–50,000 rpm/sec (no load) |
| Stability Error of Motor Spin-Coating Rotational Speed | <±1 rpm |
| Rotational Speed Regulation Accuracy and Repeatability | 1rpm |
| Display | With vacuum digital display |
| Process Time Setting | 0–3,000 sec/step, time setting resolution: 0.1 sec |
| Supports wafer sizes | Fragments up to 200 mm (8-inch wafers) |
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