Fully Automatic Ultrasonic Atmospheric-Heating Spin Coater

This product is a flexible and convenient spin-coating system with a 300 mm diameter chamber. It uses ultrasonic nozzles to dispense photoresist, which is then uniformly coated through high-speed rotation; it can also operate in standalone spin-coating mode. The chamber is equipped with built-in heating elements for post-spin baking, and features dual float-type mass flow meters to precisely control the gas supply, ensuring that an inert gas atmosphere protects the photoresist from atmospheric contamination. Primarily designed for process and patterned-surface coating applications on semiconductor wafers, microscope slides, silicon chips, substrates, ITO conductive glass, and similar materials, this system supports wafers up to 12 inches in diameter, delivering consistent and uniform coating thickness while accommodating a wide range of precision coating scenarios.

Key features:

1. Outstanding Core Performance: Equipped with a DC brushless motor and high-precision microcontroller control, the system achieves precise speed regulation up to 3,000 rpm and an acceleration of up to 2,000 rpm. It offers rapid start-up response and low speed ripple, ensuring convenient operation while stably maintaining consistent and uniform coating thickness—precisely meeting the requirements of the precision coating applications described earlier.

2. Intelligent Operational Upgrade: Equipped with a high-definition touch control screen that supports seamless switching between single-step and multi-step spin-coating modes. The system allows pre-setting and storing up to five programs, each of which can be precisely configured in five steps, enabling automated and standardized operation while significantly enhancing operational efficiency and user convenience.

3. The structural design combines practicality with professional sophistication: a clog-resistant adhesive-seal structure effectively prevents adhesive blockage from disrupting operational continuity; an integrally formed aluminum-alloy chamber delivers high mechanical strength, excellent corrosion resistance, and robust durability; and the system integrates multiple auxiliary functions—including ultrasonic spraying, atmosphere protection, and heated curing—deeply aligned with the equipment’s core functions of adhesive spreading and curing, thereby comprehensively meeting the diverse requirements of adhesive-spreading research and production applications.