5L Plasma Cleaner, 100W/150W
Category: Sample Cleaning
Overview
Technical Specifications
This product is a surface-treatment device that employs advanced plasma technology, leveraging the active species of the fourth state of matter—plasma—to achieve surface-conditioning results that are difficult to attain through conventional cleaning methods. Its primary applications include cleaning the surfaces of various materials to remove organic contaminants such as oils and oxide layers, as well as modifying material surfaces to enhance adhesion, compatibility, and wettability. It finds extensive use across multiple industries, including metal processing, automotive manufacturing, electronics, and semiconductors.
Key features:
1. High-frequency, stable RF design utilizing a 13.56 MHz standard RF power supply, compatible with various commonly used gas plasmas, ensuring uniform and stable discharge for consistent surface treatment results.
2. Flexible power options ranging from 100 W to 1,000 W, with the primary power range of 100–150 W, precisely tailored to meet the processing requirements of various materials and processes.
3. Highly adaptable to various application scenarios, with a compact footprint and integrated functionality, it supports both laboratory R&D and small-batch production. Combining cleaning and surface modification in a single system, it efficiently activates material surfaces, removes contaminants, and improves the yield of subsequent processing steps.
| Main Components | Indicator Name | Parameter Metrics |
| Clean the hopper | Cleaning chamber material | High-purity quartz |
| Cleaning chamber dimensions | Diameter: 180 mm; Length: 300 mm | |
| Radio Frequency Power Supply | Power Supply Characteristics | This power supply is a fully solid-state RF power supply that employs highly stable and reliable power amplifier and DC modules, effectively ensuring stable RF power output. The use of high-quality electronic components further guarantees the product’s reliability. |
| Power Supply Advantages | ● Can operate normally for extended periods | |
| ● Simple and flexible operation | ||
| ● High power efficiency and low heat generation | ||
| ● Features comprehensive reflected power protection | ||
| Radio Frequency Power | Continuously adjustable from 0 to 300 W | |
| Signal frequency | 13.56 MHz ±0.005% | |
| Reflected Power | ≤100W | |
| Power stability | ±0.1% | |
| RF connector | N-type head | |
| Overall machine efficiency | ≥75% | |
| Harmonic component | ≤-50 dBc | |
| Cooling method | Forced Air Cooling | |
| Gas Measurement | Measurement component | Float flowmeter |
| Gas channel | Two channels | |
| Channel A range | 10–100 ml | |
| B-channel range | 16–160 ml | |
| Vacuum acquisition | Vacuum measurement | Digital vacuum gauge (resistance gauge) |
| Vacuum extraction | Two-stage rotary vane pump | |
| Motor speed | At 50 Hz: 1440; at 60 Hz: 1720. | |
| Pumping speed | At 50 Hz: 1.1 L/s; at 60 Hz: 1.3 L/s. | |
| Vacuum range | 1 Pa to 100,000 Pa | |
| Ultimate vacuum | 1Pa | |
| Motor noise | ≤56dB | |
| Pipeline interface | Inlet: KF16; Outlet: KF16. | |
| Connect the pipeline | KF16 Vacuum Bellows | |
| Vacuum valve | Solenoid valve | |
| Motor power | 400W | |
| Other | Power supply | AC 220V 50/60Hz |
| Total machine power | 800W | |
| Operating temperature | -10℃ -- 40℃ | |
| Work vacuum | ≤40Pa | |
| Overall dimensions | 650mm×650mm×500mm | |
| Overall weight | 95kg |
Price Inquiry
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