15L Plasma Cleaner

Category: Sample Cleaning

This product is a compact, non-destructive high-tech device that leverages plasma technology to energize gases and generate highly active plasma, achieving deep cleaning performance unattainable through conventional cleaning methods. It can also modify material surfaces to enhance adhesion, compatibility, and wettability, making it suitable for both laboratory and small-scale production settings. The equipment employs a 13.56 MHz high-frequency RF power supply with adjustable power ranging from 100 W to 1000 W, paired with a precision 15-L chamber. It supports a variety of commonly used process gases, enabling low-pressure cleaning without secondary contamination, delivering efficient and thorough cleaning to meet diverse, precision-oriented processing requirements.

Overview

Technical Specifications

This product is a high-tech device based on plasma technology. It generates plasma—the fourth state of matter—by energizing a gas, and uses the resulting active species, such as ions and electrons, to treat sample surfaces, achieving results that conventional cleaning methods cannot attain. It is suitable for both laboratory settings and small-scale production environments. Its primary applications include deep surface cleaning of samples; additionally, under specific conditions, it can modify material surfaces to enhance adhesion, compatibility, and wettability, thereby meeting the requirements of coating and other related processes.

Key Features

1. Precise Capacity Matching: The standard 15-liter chamber design is specifically tailored for laboratory R&D and small-batch production, enabling both meticulous processing of small samples and efficient handling of small-scale batch operations. It offers high space utilization and highly targeted applicability across various scenarios.

2. Outstanding power performance: Equipped with a 13.56 MHz high-frequency RF power supply, it delivers exceptional stability and high excitation efficiency, precisely matching a variety of commonly used gases such as argon and oxygen to rapidly generate highly active plasma, thereby ensuring uniform and stable processing results.

3. Flexible power adjustment: The RF power supply covers the full range from 100 W to 1000 W, with multiple commonly used power settings available for on-demand selection. This allows precise power tuning based on sample material and processing requirements, balancing processing efficiency with sample protection to meet a wide variety of application scenarios.

Main Components Indicator Name Parameter Metrics
Clean the hopper Cleaning chamber material SS304
Cleaning chamber dimensions 200x160x240mm
Coupling method Capacitive coupling
Radio Frequency Power Supply Power Supply Characteristics This power supply is a fully solid-state RF power supply that employs highly stable and reliable power amplifier and DC modules, effectively ensuring stable RF power output. The use of high-quality electronic components further guarantees the product’s reliability.
Power Supply Advantages ● Can operate normally for extended periods
● Simple and flexible operation
● High power efficiency and low heat generation
● Features comprehensive reflected power protection
Radio Frequency Power Continuously adjustable from 0 to 300 W
Signal frequency 13.56 MHz ±0.005%
Reflected Power ≤100W
Power stability ±0.1%
RF connector N-type head
Overall machine efficiency ≥75%
Harmonic component ≤-50 dBc
Cooling method Forced Air Cooling
Gas measurement Measurement component Two-channel mass flow meters: Ar 0–200 sccm; O₂ 0–200 sccm; customizable.
Refer to previous products for other parameters.
Gas channel Two channels
Channel A range 10–100 ml
B-channel range 16–160 ml
Vacuum acquisition Vacuum measurement Digital vacuum gauge (resistance gauge)
Vacuum extraction Two-stage rotary vane pump
Motor speed At 50 Hz: 1440; at 60 Hz: 1720.
Pumping speed At 50 Hz: 240 L/min; at 60 Hz: 288 L/min.
Vacuum range 0.1 Pa to 10,000 Pa
Ultimate vacuum 0.5Pa
Motor noise ≤56dB
Pipeline interface Inlet: KF16; Outlet: KF16.
Connect the pipeline KF16 Vacuum Bellows
Vacuum valve KF16 Ball Valve
Motor power 400W
Other Power supply AC 220V 50/60Hz
Total machine power 800W
Operating temperature -10℃ -- 40℃
Work vacuum ≤40Pa
Overall dimensions 600mmX650mmX560mm
Overall weight 80 kg (including packaging)

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