5L Plasma Cleaner Capacitive Coupling
Category: Sample Cleaning
Overview
Technical Specifications
This product employs advanced capacitive coupling technology, using plasma—the fourth state of matter formed by the ionization of a gas through energy input—as the core processing medium, making it a high-quality upgrade and replacement for conventional cleaning equipment. Its primary application is to treat sample surfaces by leveraging the active species in plasma, such as ions, electrons, and reactive radicals, thereby achieving cleaning and coating results that are unattainable with conventional methods and meeting the surface treatment needs of a wide range of material types.
Key features:
1. Technological Leadership: Equipped with capacitive coupling technology, the plasma is stably ignited, enabling high-precision surface treatment that significantly outperforms conventional cleaning methods.
2. Outstanding Cleaning Performance: Leveraging plasma-active species, the sample surface is thoroughly treated with no residual contamination, effectively overcoming technical challenges that are difficult to address through conventional cleaning methods.
3. Wide Compatibility: The compact 5-liter chamber design caters to both small-scale production and research applications, supports a variety of materials, and ensures that the intrinsic properties of the sample remain intact throughout the process.
| Main Components | Indicator Name | Parameter Metrics |
| Clean the hopper | Cleaning chamber material | SS304 |
| Cleaning chamber dimensions | 200x160x240mm | |
| Coupling method | Capacitive coupling | |
| Radio Frequency Power Supply | Power Supply Characteristics | This power supply is a fully solid-state RF power supply that employs highly stable and reliable power amplifier and DC modules, effectively ensuring stable RF power output. The use of high-quality electronic components further guarantees the product’s reliability. |
| Power Supply Advantages | ● Can operate normally for extended periods | |
| ● Simple and flexible operation | ||
| ● High power efficiency and low heat generation | ||
| ● Features comprehensive reflected power protection | ||
| Radio Frequency Power | Continuously adjustable from 0 to 300 W | |
| Signal frequency | 13.56 MHz ±0.005% | |
| Reflected Power | ≤100W | |
| Power stability | ±0.1% | |
| RF connector | N-type head | |
| Overall machine efficiency | ≥75% | |
| Harmonic component | ≤-50 dBc | |
| Cooling method | Forced Air Cooling | |
| Gas Measurement | Measurement component | Two-channel mass flow meters: Ar 0–200 sccm; O₂ 0–200 sccm; customizable. |
| Refer to previous products for other parameters. | ||
| Gas channel | Two channels | |
| Channel A range | 10–100 ml | |
| B-channel range | 16–160 ml | |
| Vacuum acquisition | Vacuum measurement | Digital vacuum gauge (resistance gauge) |
| Vacuum extraction | Two-stage rotary vane pump | |
| Motor speed | At 50 Hz: 1440; at 60 Hz: 1720. | |
| Pumping speed | At 50 Hz: 240 L/min; at 60 Hz: 288 L/min. | |
| Vacuum range | 0.1 Pa to 10,000 Pa | |
| Ultimate vacuum | 0.5Pa | |
| Motor noise | ≤56dB | |
| Pipeline interface | Inlet: KF16; Outlet: KF16. | |
| Connect the pipeline | KF16 Vacuum Bellows | |
| Vacuum valve | KF16 ball valve | |
| Motor power | 400W | |
| Other | Power supply | AC 220V 50/60Hz |
| Total machine power | 800W | |
| Operating temperature | -10℃ -- 40℃ | |
| Work vacuum | ≤40Pa | |
| Overall dimensions | 600mmX650mmX560mm | |
| Overall weight | 80 kg (including packaging) | |
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