This vacuum-corrosion-resistant spin coater features a vacuum-sealed chamber with a pressure-rated inner cavity and lid, enabling the chamber to be evacuated to a negative pressure of at least –0.06 MPa for spin-coating operations. It is specifically designed to handle highly corrosive, easily foaming, and difficult-to-volatilize coating liquids that conventional spin coaters struggle to process. It is primarily used in applications such as chip manufacturing, battery production, optical glass processing, sensor fabrication, ceramic substrate production, and precision component assembly, delivering a high-quality, uniform, bubble-free, pinhole-free, and corrosion-resistant thin film.
Keywords： spin coaterspin coater
