CF63-4xCF35 Reducing Six-Way Tee
Category: CF Six-way
Overview
Technical Specifications
This product features a CF-standard knife-edge sealing design, enabling step-down adaptation between the main CF63 interface and four CF35 interfaces. Its core advantages include superior high-vacuum sealing performance, high structural strength, smooth flow conductance, and versatile multi-port expansion capabilities. It is ideally suited for a wide range of applications, including vacuum system integration, multi-channel pipeline connections, chamber expansion, and multi-station observation, providing stable and reliable vacuum piping connection solutions for semiconductor, coating, and research-grade vacuum equipment.
Key features:
1. Multi-port variable-diameter integrated structure
This design employs a six-way configuration featuring one CF63 main interface and four CF35 branch interfaces, ensuring smooth diameter transitions with minimal flow resistance. It enables the centralized connection of multiple vacuum lines, observation windows, sensors, valves, and other components, achieving high integration and optimizing cavity space utilization.
2. Ultra-High Vacuum Sealing Performance
It employs a CF-flange metal-seal design combined with oxygen-free copper gaskets to achieve a hard seal, delivering ultra-low leak rates, zero volatilization, and no permeation—meeting the stringent requirements of UHV ultra-high-vacuum systems while ensuring stable and reliable sealing performance.
3. Standard CF interface, universally interchangeable
Both the primary and secondary interfaces feature standard CF flanges, with precise dimensional specifications and accurate alignment, enabling direct connection to CF63 and CF35 series vacuum chambers, valves, viewports, pump bodies, and other accessories. This design ensures easy installation, broad compatibility, and excellent interchangeability.
4. Excellent material cleanliness and strength
Manufactured from precision-finished 304/316L stainless steel, it features a smooth surface, excellent corrosion resistance, and superior high-temperature bake-out performance. It is non-magnetic and contamination-free, making it ideal for high-cleanliness vacuum environments, while also exhibiting outstanding dimensional stability and robust structural rigidity.
5. Bakeable and suitable for high/low temperature operating conditions
The all-metal construction contains no plastics or organic materials, enabling high-temperature bake-out in vacuum systems for outgassing. It offers a wide temperature range, excellent thermal shock resistance, and is compatible with a variety of scientific and industrial vacuum applications.
Typical Applications
1. Ultra-high vacuum research equipment: molecular beam epitaxy (MBE), scanning tunneling microscopy/atomic force microscopy (STM/AFM), vacuum physics experimental platform, and multi-station vacuum analysis system.
2. Semiconductor and Thin-Film Equipment: PVD/CVD/ALD vacuum deposition equipment, ion etching, vacuum chamber expansion, and multi-channel gas delivery/detection interfaces.
3. Vacuum System Integration: vacuum furnaces, space simulation chambers, leak detection equipment, vacuum pipeline distribution, and the construction of multi-branch vacuum systems.
4. Optical and vacuum detection assemblies: Designed for integrated use with multiple interfaces, including observation windows, laser beam entry, spectral detection, and imaging monitoring.
5. Laboratory Vacuum Systems: University/Research Institute vacuum experimentation platforms, multi-station sample chambers, vacuum interconnection systems, and multi-channel sensor integration.
You May Also Like
Price Inquiry
You can contact us through any convenient means, and we provide services 24/7 via phone or email. We are happy to answer your questions