Multi-Arc Ion Coating Machine
Category: Multi-arc ion plating
Overview
Technical Specifications
This high-performance equipment is specifically designed for laboratory and small-batch precision coating applications, with a core positioning of “dense film layers, strong adhesion, and broad target material compatibility.” It strikes an optimal balance between research-grade precision and ease of operation, making it ideally suited for universities, research institutes, and corporate R&D departments. The system provides stable and reliable hardware support for precision coating of diverse substrates, including metals, alloys, and ceramics, thereby advancing research and small-batch production in fields such as optics, electronics, and mechanical engineering.
Key Features
1. Core Process Advantages: This system employs multi-arc ion plating technology, in which arc discharge is used to excite the target material and generate a plasma, enabling rapid film deposition. Compared with conventional coating equipment, this process yields films with higher density and stronger adhesion to the substrate, making them less prone to delamination or wear. Moreover, it allows for precise control of film thickness, thereby meeting the stringent requirements of precision coating applications.
2. Flexible multi-target compatibility: Equipped with multiple independent arc sources, the system supports single-target deposition, alternating multi-target deposition, or co-deposition, and is compatible with a wide range of target materials, including metals and alloys such as titanium, chromium, gold, and silver. This enables flexible fabrication of single-layer and multilayer composite films, significantly expanding process versatility for both research and production and meeting diverse coating requirements across various applications.
3. Precise and Controllable Operation: Equipped with a high-precision vacuum control system, arc power supply, and temperature-control module, this equipment enables precise adjustment of critical parameters such as vacuum level, arc current, and coating time. The temperature field is uniform and stable, effectively preventing defects like color variation, pinholes, and cracking in the coating layer, thereby ensuring consistent coating quality. The touch-screen interface is simple and intuitive, with multiple sets of standard process parameters pre-programmed, allowing even novice operators to quickly get up to speed and reducing human error.
4. High laboratory adaptability: The modular, compact design ensures a moderate footprint and efficient space utilization, allowing flexible placement on laboratory workstations; it features low operating noise, excellent sealing performance, and easy maintenance, with no need for complex installation or commissioning, making it suitable for research experiments, educational demonstrations, and small-batch precision coating production.
5. Safe and Reliable Operation: The system is equipped with multiple safety features, including arc protection, over-temperature warning, vacuum detection, and leakage protection, effectively mitigating safety risks during the coating process. The furnace chamber is constructed from high-temperature and corrosion-resistant materials, extending equipment service life and ensuring long-term stable operation.
| Sample stage | Size | Planetary sample stage, outer diameter 305 mm, with six stations around the perimeter. |
| Workpieces can be suspended from the support rods at each workstation. | ||
| External rotation speed is adjustable from 1 to 20 rpm. | ||
| Multi-arc ion target | Quantity | φ84mm × 2 |
| Vacuum chamber | Cavity dimensions | φ300mm × 400mm |
| Observation Window | Front-mounted φ100mm with a light shield | |
| Cavity material | 304 stainless steel | |
| Activation method | Front-opening type | |
| Film Thickness Control | Crystal oscillator-based film thickness gauge, with optional multi-channel film thickness controller | |
| Vacuum system | Front-stage pump | Two-stage rotary vane pump |
| Vacuum port | KF16 | |
| Secondary pump | Turbomolecular pump | |
| Vacuum port | CF160 | |
| Vacuum measurement | Resistance-plus-ionization composite vacuum gauge | |
| Exhaust rate | Mechanical pump 1.1 L/s | |
| Molecular pump, 600 L/s | ||
| Ultimate vacuum | 1.0E-5Pa | |
| Power supply | AC 220V 50/60Hz | |
| Pumping speed | Rotary vane pump: 1.1 L/s | |
| Control System | Automatic Control – Operating Interface: Touch Screen + Control Panel | |
| Other | Supply voltage | AC 380V, 50Hz |
| Overall dimensions | 1000mm x 800mm x 1500mm | |
| Overall weight | 350kg | |
| Total machine power | 5kW | |
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