Four-Head Ultrasonic Spin Coater

This product does not simply dispense adhesive at the center; instead, it operates like a “3D printer” or an “inkjet printer,” using program-controlled four nozzles to perform scan-based dispensing across the substrate surface along a pre-set path. Each nozzle can operate independently or in coordinated synergy, delivering unprecedented coating uniformity and flexibility. The system is equipped with a high-precision robotic arm: the four nozzles are mounted on a multi-degree-of-freedom robotic arm, enabling precise control of the nozzles’ complex three-dimensional motion above the substrate. Ultrasonic atomization technology is employed: high-frequency ultrasonic vibrations “tear” the liquid into extremely fine, uniformly sized mist droplets—typically on the micrometer scale—and then propel them outward using a carrier gas. A sophisticated collaborative control system—a comprehensive software platform—synchronously manages the on/off states and flow rates of each nozzle, as well as the robotic arm’s motion trajectories.

Key features:
1. Exceptional coating uniformity: Four independent, coordinated spray nozzles utilize ultrasonic atomization to generate micron-sized, uniformly distributed droplets, coupled with precise motion control, resulting in minimal thickness variation. Coating uniformity on large-area and complex substrates can exceed 95%, significantly outperforming conventional single-nozzle spin coating.
2. Excellent coverage on steps: Non-contact atomization spraying with four nozzles enables multi-angle operation, ensuring uniform coverage of complex three-dimensional structures such as deep grooves and cantilever beams, eliminating the “shadow effect” and guaranteeing consistent coating thickness on grooves, sidewalls, and bottoms.
3. Exceptionally high material utilization: With no high-pressure splashing and directional droplet deposition, material utilization exceeds 90%, several times that of conventional spray coating, significantly reducing waste of high-value materials such as photoresists and precious-metal pastes.
4. Compatibility with Multiple Materials and Multilayer Coatings: The four-nozzle system allows independent fluid supply and independent control, enabling the simultaneous deposition of multiple materials, multilayer films, or gradient coatings. It is compatible with a wide range of formulations, including solutions, sols, and nanodispersions.
5. Gentle and non-damaging, with high production efficiency: No high-pressure gas jet impact ensures protection of fragile substrates; multiple nozzles operate in parallel, significantly boosting throughput, making it well-suited for the mass production and high-precision requirements of semiconductor and MEMS manufacturing.