Desktop Dual-Target Magnetron Sputtering Coating System

Category: Magnetron sputtering system

This product can be used to prepare single-layer or multilayer ferroelectric films, conductive films, alloy films, and more. Compared with similar equipment, this dual-target magnetron sputtering deposition system is not only widely applicable but also features a compact footprint and ease of operation, making it an ideal instrument for laboratory-scale thin-film material preparation.

Overview

Technical Specifications

This product is a high-performance system specifically developed to meet the multi-element thin-film deposition needs of laboratories. With “uniform film formation, broad target compatibility, and stable, easy-to-control operation” as its core design principles, it strikes an optimal balance between research-grade precision and practical usability. It is perfectly suited to the diverse experimental settings found in university, research institute, and corporate laboratories, providing stable and reliable hardware support for the preparation of various metallic, oxide, and semiconductor thin films.

Key features:

  1. Leading dual-target design: Equipped with a dual-independent target system, it enables single-target continuous sputtering, simultaneous or alternating dual-target sputtering, and supports the deposition of multi-component, multilayer thin films, significantly expanding the diversity of experimental processes.
  2. Precision and High-Efficiency Film Deposition: Equipped with a high-precision vacuum control system and stable DC/RF power supplies, the sputtering process is stable and well-controlled, resulting in high target utilization, excellent film uniformity and density, and the ability to meet the requirements of various precision coating experiments.
  3. Convenient and easy-to-control operation: touchscreen interface combined with preset process curves simplifies the coating process, lowers the learning curve, enables quick onboarding for beginners, and reduces human error.
  4. Highly adaptable for laboratory use: featuring a compact, modular design that is sturdy, aesthetically pleasing, and space-efficient, with easy maintenance; it can be conveniently mounted on various laboratory worktops or integrated into chamber installations.
  5. Widely applicable : It can be used to fabricate various thin films, including metals, alloys, oxides, and nitrides, which are widely employed in semiconductor devices, optical coatings, sensors, new energy materials, surface modification, and other fields.
Project Details
Supply voltage AC 220V, 50Hz
Total machine power 6KW
System vacuum ≦5×10⁻⁴ Pa
Sample stage External dimensions φ150mm
Heating temperature ≦600℃
Temperature control accuracy ±1℃
Adjustable speed ≦20 rpm
Magnetic Control Target Gun Target material dimensions Diameter Φ50.8 mm, thickness ≤ 3 mm
Cooling mode Recirculating Water Cooling
Water flow rate Not less than 10 L/min
Quantity 2
Vacuum chamber Cavity dimensions Diameter φ325mm, height 500mm
Cavity Material SUU304 stainless steel
Observation Window Diameter φ100mm
Activation Method Top-opening
Gas Control The Model 1 mass flow meter is used to control the Ar flow, with a range of 200 SCCM.
Vacuum system One set of molecular pump system, with a gas pumping speed of 600 L/s.
Film thickness measurement Optional quartz crystal film-thickness meter, with a resolution of 0.10 Å.
Sputtering power supply Equipped with a DC power supply, 500 W power, and 500 W RF.
Control System Self-developed professional-grade control system
Equipment dimensions 540mm×540mm×1000mm
Equipment weight 350kg

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