Overview
Technical Specifications
This product is a compact, ultra-high-vacuum multi-port manifold fabricated using a thin-walled stainless-steel deep-drawing process. All six ports are equipped with CF16 miniature vacuum flanges, enabling simultaneous connection of six pipeline lines, distribution of gas flow, or expansion of interface capacity in small vacuum systems. It is classified as a miniature vacuum chamber component.
Key features:
1. Miniature six-way structure with high integration
Six CF16 standard interfaces, compact in size and ideal for space-constrained miniature vacuum systems, allow simultaneous connection of multiple components such as gauges, valves, leak detectors, and sampling ports.
2. Stretch forming with a smooth inner wall and excellent flow conductivity.
Utilizing a stainless steel deep-drawing process, the internal flow channels are smooth and free of dead corners, resulting in low flow resistance, minimal dust accumulation, easy cleaning, and effective outgassing under high vacuum conditions.
3. CF knife-edge metal seal, suitable for ultra-high vacuum
The interface is a CF knife-edge flange, paired with an oxygen-free copper gasket to achieve metal-to-metal hard sealing, resulting in an extremely low leak rate and making it suitable for UHV ultra-high vacuum environments.
4. All-metal construction, suitable for high-temperature baking.
Made entirely of 304/316L stainless steel, with no rubber or plastic components; suitable for high-temperature bake-out to remove outgassing, resulting in low outgassing rates—ideal for high-cleanliness vacuum systems.
5. Small volume, light weight, and good rigidity
Drawn parts feature uniform wall thickness, stable structure, excellent resistance to deformation, and easy installation, making them well suited for compact equipment.
6. Strong versatility of standard interfaces
CF16 is an internationally standardized miniature vacuum flange that is directly interchangeable with various CF16 blind flanges, elbows, valves, and fittings.
Typical Applications
1. Miniature Ultra-High Vacuum System
Small-scale research vacuum chambers, mass spectrometer interfaces, leak detection devices, and portable vacuum equipment.
2. Semiconductor Precision Equipment
Micro gas distribution systems, sensor interfaces, vacuum test point expansion, and wafer inspection equipment.
3. Laboratory Precision Instruments
Small-scale coating equipment, electron microscope accessories, ion-source gas delivery systems, and miniature vacuum circuits for physics experiments.
4. Analytical and Testing Instruments
Gas-phase/mass-spectrometry interface, residual gas analysis, vacuum calibration equipment, and a micro-sampling system.
5. Research and Space Simulation Facilities
Small-scale space environment simulation chamber, microgravity experiment vacuum assembly, and multi-channel miniature pneumatic circuit integration.
| Flange Dimensions (Imperial) | Reference for common domestic specifications | Center Distance A (mm) |
| CF1.33" | CF35 | 38.1 |
| CF2.12" | CF50 | 52.07 |
| CF2.75" | CF63 | 62.48 |
| CF3.38" | CF80 | 81.79 |
| CF4.50" | CF100 | 85.85 |
| CF4.62" | CF114 | 92.2 |
| CF6.00" | CF150 | 134.9 |
| Model | A/mm | Materials | Weight/Kg |
| CF16 three-way connector | 38 | 304 | 0.23 |
| CF25 three-way connector | 58 | 304 | 0.68 |
| CF35 three-way fitting | 63 | 304 | 0.9 |
| CF50 three-way connector | 80 | 304 | 1.8 |
| CF63 three-way connector | 105 | 304 | 3.63 |
| CF80 three-way fitting | 118 | 304 | 5.3 |
| CF100 three-way connector | 135 | 304 | 6.8 |
| CF150 three-way fitting | 167 | 304 | 10.89 |
| CF200 three-way connector | 203 | 304 | 11.79 |
| CF250 three-way connector | 208 | 304 | 17.24 |
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