Vacuum Thermocouple CF250-Φ1

This product is a high-precision temperature measurement module specifically developed for ultra-high vacuum and wide-temperature-range operating conditions. Its core features include CF250 standard flange compatibility, a Φ1 ultra-fine probe, precise temperature measurement across a broad temperature range, and superior ultra-high vacuum sealing. It provides stable performance in extreme vacuum and extreme temperature environments, making it ideally suited for large vacuum chambers, high-temperature vacuum furnaces, large-diameter semiconductor process equipment, and high-end scientific research vacuum experimental setups. It delivers highly reliable hardware support for accurate temperature acquisition and process temperature control in ultra-high vacuum environments.
Key features:
1. Precision Wide-Range Temperature Measurement: Utilizing a high-sensitivity thermocouple sensing element, this solution delivers rapid temperature response and exceptional accuracy, covering an ultra-wide operating temperature range. It is suitable for comprehensive temperature monitoring across all operating conditions—from low to high temperatures—thereby meeting the precise temperature-control requirements of industrial production and scientific research applications.
2. Ultra-High Vacuum Sealing: Equipped with a CF250 standard ultra-high vacuum flange and featuring a precision metal sealing design, this system achieves an ultra-high vacuum level of 1×10⁻⁸ Pa, with a leak rate approaching zero, thereby ensuring long-term, leak-free, and stable operation of large-scale vacuum chamber systems.
3. Ultra-fine probe design: A Φ1 ultra-fine temperature-sensing probe that is compact in size and designed for insertion-type installation, minimizing disturbance to the flow and temperature fields within the vacuum chamber. It can penetrate narrow internal spaces to perform precise temperature measurements, making it well-suited for accurate temperature acquisition in complex-structured vacuum equipment.
4. High Temperature, Corrosion-Resistant, and Durable: The probe rod is made of a special high-temperature, corrosion-resistant metal that can withstand high-temperature baking and extreme operating conditions, offering excellent oxidation resistance and resistance to media-induced corrosion. It exhibits no deformation or risk of failure, significantly extending component service life and reducing maintenance costs.
5. Excellent adaptability of the large flange: The CF250 large-diameter standard flange interface is perfectly compatible with the specifications of large vacuum chambers, large-diameter vacuum furnaces, and large-process chambers for semiconductor manufacturing currently available on the market, eliminating the need for additional custom adapter components. This enables convenient integrated connection and outstanding compatibility.
6. Stable, reliable, and easy to operate: The compact, stress-free overall design delivers outstanding seismic and anti-interference performance, ensuring stable operation under vacuum and high–low temperature cycling conditions. Wiring and installation are straightforward, enabling rapid integration with temperature-control systems and seamless compatibility with automated process monitoring.

Scope of application:
1. Vacuum high-temperature system: internal temperature measurement components such as the vacuum chamber and vacuum reactor vessel.
2. Precision vacuum experimental equipment: temperature monitoring components for laboratory vacuum systems and vacuum simulation equipment.
3. Industrial vacuum equipment: temperature acquisition modules for vacuum smelting, vacuum coating, and vacuum testing equipment.
4. Scientific research vacuum equipment: temperature monitoring components for vacuum experiments, space environment simulation chambers, and other applications.
5. High-requirement vacuum applications: Various vacuum systems that impose stringent requirements on temperature measurement accuracy and vacuum sealing.