CF100-6-pin M3 electrode flange (high-voltage type)
Category: CF electrode
Overview
Technical Specifications
This product is a high-performance accessory specifically designed for electrical testing, plasma excitation, and thin-film deposition processes in high-vacuum/high-pressure environments. Its core positioning is “reliable insulation, strong adaptability, superior sealing, and high-voltage stability,” while also balancing structural stability with ease of installation. It is perfectly compatible with various CF100-standard vacuum chambers, providing dependable hardware support for stable transmission of electrical signals under high-pressure operating conditions.
Key features:
1. Superior Insulation: Customized insulation structure design ensures high-voltage withstand capability and excellent creepage resistance, effectively eliminating the risks of leakage current and dielectric breakdown to safeguard equipment and experimental safety.
2. Wide Compatibility: The 6-pin M3 electrode configuration is compatible with a wide range of high-voltage power supplies and test systems, and is compatible with equipment such as magnetron sputtering, ion plating, and plasma cleaning systems.
3. Reliable sealing: Equipped with a standard CF100 flange interface and a high-vacuum sealing design, ensuring zero leakage and loss, making it suitable for high-vacuum experimental applications.
4. Convenient Installation: Modular design with a compact and robust structure, enabling simple installation and maintenance, and compatible with various vacuum equipment workstations and chamber installations.
| Model | flange | F | C | L | A | L1 | L2 | Extremely dry material | Current (A) | Voltage (kV) | N | Order number |
| 16-1 | CF16 | 34 | 1 | 80 | 55 | 4J29 | 1.5 | 2 | 2 | 140301n | ||
| 16-M2 | M2 | 80 | 55 | 12 | 12 | 4J29 | 5 | 5 | 2 | 140302n | ||
| 16-M3 | M3 | 80 | 55 | 12 | 12 | 4J29 | 10 | 5 | 1 | 140303n | ||
| 25-2 | CF25 | 54 | 2 | 80 | 55 | 4J29 | 5 | 5 | 4 | 140304n | ||
| 25-M2 | M2 | 80 | 55 | 12 | 12 | 4J29 | 5 | 5 | 2 | 140305n | ||
| 25-M3 | M3 | 80 | 55 | 12 | 12 | 4J29 | 10 | 5 | 2 | 140306n | ||
| 25-M6 | M6 | 80 | 55 | 14 | 18 | TU1 | 40 | 2 | 1 | 140307n | ||
| 35-2 | CF35 | 70 | 2 | 80 | 55 | 4J29 | 5 | 5 | 6 | 140308n | ||
| 35-M2 | M2 | 80 | 55 | 12 | 12 | 4J29 | 5 | 5 | 4 | 140309n | ||
| 35-M3 | M3 | 80 | 55 | 12 | 12 | 4J29 | 10 | 5 | 4 | 140310n | ||
| 35-M6 | M6 | 80 | 55 | 14 | 18 | TU1 | 40 | 2 | 1 | 140311n | ||
| 50-2 | CF50 | 86 | 2 | 80 | 55 | 4J29 | 5 | 5 | 8 | 140312n | ||
| 50-M2 | M2 | 80 | 55 | 12 | 12 | 4J29 | 5 | 5 | 6 | 140313n | ||
| 50-M3 | M2 | 80 | 55 | 12 | 12 | 4J29 | 10 | 5 | 6 | 140314n | ||
| 50-M6 | M6 | 80 | 55 | 14 | 18 | TU1 | 40 | 2 | 2 | 140315n | ||
| 63-2 | CF63 | 114 | 2 | 80 | 55 | 4J29 | 5 | 2 | 12 | 140316n | ||
| 63-M2 | M2 | 80 | 55 | 12 | 12 | 4J29 | 5 | 5 | 10 | 140317n | ||
| 63-M3 | M3 | 80 | 55 | 12 | 12 | 4J29 | 10 | 5 | 10 | 140318n | ||
| 63-M6 | M6 | 80 | 55 | 14 | 18 | TU1 | 40 | 2 | 4 | 140319n | ||
| 100-2 | CF100 | 152 | 2 | 80 | 55 | 4J29 | 5 | 5 | 16 | 140320n | ||
| 100-M2 | M2 | 80 | 55 | 4J29 | 5 | 5 | 14 | 140321n | ||||
| 100-M3 | M2 | 80 | 55 | 4J29 | 10 | 5 | 14 | 140322n | ||||
| 100-M6 | M6 | 80 | 55 | 14 | 18 | TU1 | 40 | 2 | 6 | 140323n |
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