CF100-6 Pin M3 Electrode Flange (20 kV High-Voltage Type)
Category: CF electrode
Overview
Technical Specifications
This product is a high-voltage electrode feedthrough assembly specifically designed for high-vacuum systems. It features a standard CF100 flange configuration, ensuring reliable sealing and compatibility with both high- and ultra-high-vacuum environments. The assembly supports 20 kV high-voltage insulation with stable dielectric performance and excellent breakdown resistance. Its six-pin M3 threaded electrode arrangement is neatly organized, offering excellent electrical conductivity and ease of installation. With its compact design and straightforward mounting, it is widely used in research and industrial vacuum systems—including vacuum coating equipment, plasma processing systems, and semiconductor manufacturing tools—to meet the dual requirements of high-voltage power supply and vacuum isolation.
Key features:
1. Standard CF100 flange, providing stable high-vacuum sealing with no leaks and ensuring cleanliness and contamination-free operation;
2. 20 kV high-voltage insulation design, with high dielectric strength and safe, reliable operation;
3.6-pin M3 electrode configuration, easy wiring, and compatible with a wide range of equipment for electrode connection;
4. Robust and durable construction, suitable for vacuum coating, plasma processing, semiconductor manufacturing, and other vacuum equipment.
| Model | flange | F | C | L | A | L1 | L2 | Extremely dry material | Current (A) | Voltage (kV) | N | Order number |
| 16-1 | CF16 | 34 | 1 | 80 | 55 | 4J29 | 1.5 | 2 | 2 | 140301n | ||
| 16-M2 | M2 | 80 | 55 | 12 | 12 | 4J29 | 5 | 5 | 2 | 140302n | ||
| 16-M3 | M3 | 80 | 55 | 12 | 12 | 4J29 | 10 | 5 | 1 | 140303n | ||
| 25-2 | CF25 | 54 | 2 | 80 | 55 | 4J29 | 5 | 5 | 4 | 140304n | ||
| 25-M2 | M2 | 80 | 55 | 12 | 12 | 4J29 | 5 | 5 | 2 | 140305n | ||
| 25-M3 | M3 | 80 | 55 | 12 | 12 | 4J29 | 10 | 5 | 2 | 140306n | ||
| 25-M6 | M6 | 80 | 55 | 14 | 18 | TU1 | 40 | 2 | 1 | 140307n | ||
| 35-2 | CF35 | 70 | 2 | 80 | 55 | 4J29 | 5 | 5 | 6 | 140308n | ||
| 35-M2 | M2 | 80 | 55 | 12 | 12 | 4J29 | 5 | 5 | 4 | 140309n | ||
| 35-M3 | M3 | 80 | 55 | 12 | 12 | 4J29 | 10 | 5 | 4 | 140310n | ||
| 35-M6 | M6 | 80 | 55 | 14 | 18 | TU1 | 40 | 2 | 1 | 140311n | ||
| 50-2 | CF50 | 86 | 2 | 80 | 55 | 4J29 | 5 | 5 | 8 | 140312n | ||
| 50-M2 | M2 | 80 | 55 | 12 | 12 | 4J29 | 5 | 5 | 6 | 140313n | ||
| 50-M3 | M2 | 80 | 55 | 12 | 12 | 4J29 | 10 | 5 | 6 | 140314n | ||
| 50-M6 | M6 | 80 | 55 | 14 | 18 | TU1 | 40 | 2 | 2 | 140315n | ||
| 63-2 | CF63 | 114 | 2 | 80 | 55 | 4J29 | 5 | 2 | 12 | 140316n | ||
| 63-M2 | M2 | 80 | 55 | 12 | 12 | 4J29 | 5 | 5 | 10 | 140317n | ||
| 63-M3 | M3 | 80 | 55 | 12 | 12 | 4J29 | 10 | 5 | 10 | 140318n | ||
| 63-M6 | M6 | 80 | 55 | 14 | 18 | TU1 | 40 | 2 | 4 | 140319n | ||
| 100-2 | CF100 | 152 | 2 | 80 | 55 | 4J29 | 5 | 5 | 16 | 140320n | ||
| 100-M2 | M2 | 80 | 55 | 4J29 | 5 | 5 | 14 | 140321n | ||||
| 100-M3 | M2 | 80 | 55 | 4J29 | 10 | 5 | 14 | 140322n | ||||
| 100-M6 | M6 | 80 | 55 | 14 | 18 | TU1 | 40 | 2 | 6 | 140323n |
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